BEOL N2: M2 through SAxP process from MP21 to MP26: 193i SAQP vs EUV SADP
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文献信息
题目
BEOL N2: M2 through SAxP process from MP21 to MP26: 193i SAQP vs EUV SADP
作者
Yannick Hermans, Chen Wu, Nunzio Buccheri, Filip Schleicher, Janko Versluijs, Daniel Montero, Bappaditya Dey, Patrick Wong, Paulina Rincon-Delgadillo, Seongho Park, Zsolt Tokei, Philippe Leray, Sandip Halder
Scihuhuan