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Vacuum-assisted void-free copper filling of high-aspect-ratio through-glass vias for advanced interposers
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文献信息
- 题目
- Vacuum-assisted void-free copper filling of high-aspect-ratio through-glass vias for advanced interposers
- 作者
- Hyemin An, Sangyeun Park, Yonghyun Kim, Hoyoon Lee, Gayoung Kim, Kyunam Lee, Seakjoon Lee, Hongyun So
- 发表年份
- 2026
- 期刊 / 来源
- Journal of Materials Research and Technology
- 出版社
- Elsevier
- 文献类型
- 学术文献
- 平台记录更新
- 2026-09-03 21:57:26
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